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SAW WAFERS

  • Features
Wafers are thin plates made from piezoelectric crystals, one side polished, diameter of 3 or 4 inches. They are used for production of surface acoustic wave (SAW) devices such as SAW-resonators, SAW-oscillators and SAW-filters. This devices are used in electronic equipment for frequency control and selection. Widely used are the wafers made from crystals of synthetic quartz, lithium niobate, lithium tantalate, etc.
Parameter3-inch wafer4-inch wafer
Diameter [ mm ]76.2 ± 0.2100.0 ± 0.2
Thickness [ µm ]standard 500 or 350 or customer specified
Cut anglefamily of ST-cuts with tolerance ±5'
LTV [ µm ]better then 3 on the mesh 10 x 10 mm
Bow [ µm ]better then 40
Polished surfaceSAW-quality, rms better then 0.5 nm
X-axis markingby the flat ( see drawing ) or customer specified

Synthetic Quartz material specification ( according EN/IEC 60758:2004, Ed.3 ):
- Quality grade: Grade C ( > 1.8 x 106 )
- Inclusion density: Grade Ib
- Etch channel density: Grade 3
Parameter3-inch wafer4-inch wafer
Diameter [ mm ]76.2 ± 0.2100.0 ± 0.2
Thickness [ µm ]standard 500 or 350 or customer specified
Cut angleY, Y 41°, Y 64°, Y 127.86° etc.
with tolerance ±18'
LTV [ µm ]better then 5 on the mesh 10 x 10 mm
Bow [ µm ]better then 40
Polished surfaceSAW-quality, rms better then 0.7 nm
X-axis markingby the flat ( see drawing ) or customer specified

Lithium Niobate material specification: White or black single crystal for SAW application
Please consult with us for other specification.
3" wafer  4" wafer