KRYSTALY

SAW WAFERS

Features

Wafers are thin plates made from piezoelectric crystals, one side polished, diameter of 3 or 4 inches. They are used for production of surface acoustic wave (SAW) devices such as SAW-resonators, SAW-oscillators and SAW-filters. This devices are used in electronic equipment for frequency control and selection. Widely used are the wafers made from crystals of synthetic quartz, lithium niobate, lithium tantalate, etc.

Typical specifications of Quartz Wafers

Parameter	3-inch wafer	4-inch wafer
Diameter [ mm ]	76.2 ± 0.2	100.0 ± 0.2
Thickness [ µm ]	standard 500 or 350 or customer specified
Cut angle	family of ST-cuts with tolerance ±5'
LTV [ µm ]	better then 3 on the mesh 10 x 10 mm
Bow [ µm ]	better then 40
Polished surface	SAW-quality, rms better then 0.5 nm
X-axis marking	by the flat ( see drawing ) or customer specified

Synthetic Quartz material specification ( according EN/IEC 60758:2004, Ed.3 ):

- Quality grade:		Grade C ( > 1.8 x 10⁶ )
- Inclusion density:		Grade Ib
- Etch channel density:		Grade 3

Typical specifications of Lithium Niobate Wafers

Parameter	3-inch wafer	4-inch wafer
Diameter [ mm ]	76.2 ± 0.2	100.0 ± 0.2
Thickness [ µm ]	standard 500 or 350 or customer specified
Cut angle	Y, Y 41°, Y 64°, Y 127.86° etc. with tolerance ±18'
LTV [ µm ]	better then 5 on the mesh 10 x 10 mm
Bow [ µm ]	better then 40
Polished surface	SAW-quality, rms better then 0.7 nm
X-axis marking	by the flat ( see drawing ) or customer specified

Lithium Niobate material specification: White or black single crystal for SAW application
Please consult with us for other specification.

Outline dimensions [Unit: mm]

3" wafer

4" wafer