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Quartz Crystal Monitor ( QCM )

  • Typical application
QCM for thin film deposition control
  • Typical specifications

TypeQuartz Crystal Monitor for Thin Film Deposition Control
Frequency Range4990 kHz ±20 kHz5970 kHz ±20 kHz10000 kHz ±1 kHz
Operating Temperature Range+15 ... +55 °C+20 ... +125 °C+15 ... +30 °C
Frequency Stability vs. Temperature Range±5 x 10-6±40 x 10-6±100 x 10-6
Resistance20 Ω max.20 Ω max.30 Ω max.
MetallisationCr+Au, Cr+Ag, Au, Ag - Model 1 or 2Cr+Au, Cr+Ag, Au, Ag - Model 3
Drive level100 µW max.
Please consult with us for other specification.

 

Download:

Quartz Crystal Monitorpkj_cat_8.pdf507 kB

 

Outline dimensions [Unit: mm]

Model 1
Shape: plano-convex

 

Model 2
Shape: plano-convex

 

Model 3
Shape: plano-plano