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Quartz Crystal Monitor ( QCM )
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Typical specifications
| Type | Quartz Crystal Monitor for Thin Film Deposition Control | ||
|---|---|---|---|
| Frequency Range | 4990 kHz ±20 kHz | 5970 kHz ±20 kHz | 10000 kHz ±1 kHz |
| Operating Temperature Range | +15 ... +55 °C | +20 ... +125 °C | +15 ... +30 °C |
| Frequency Stability vs. Temperature Range | ±5 x 10-6 | ±40 x 10-6 | ±100 x 10-6 |
| Resistance | 20 Ω max. | 20 Ω max. | 30 Ω max. |
| Metallisation | Cr+Au, Cr+Ag, Au, Ag - Model 1 or 2 | Cr+Au, Cr+Ag, Au, Ag - Model 3 | |
| Drive level | 100 µW max. | ||
Download:
| Quartz Crystal Monitor | pkj_cat_8.pdf | 507 kB |
Outline dimensions [Unit: mm]
Model 1
Shape: plano-convex
Model 2
Shape: plano-convex
Model 3
Shape: plano-plano
